This research focuses on the computational analysis and numerical investigation of BrCl ion density within an HBr-Cl_2 capacitively coupled plasma system. A two-dimensional fluid simulation model was developed to examine the influence of varying the HBr: Cl_2 gas ratio on BrCl ion formation. The simulation framework incorporates fundamental plasma fluid equations, including the continuity equation, momentum conservation equations, and energy conservation equations, along with appropriate boundary conditions. The investigation specifically explored gas composition variations ranging from 10% Cl_2 and 90% HBr to 90% Cl_2 and 10% HBr, incremented in 20% steps. The radio frequency (RF) driving f... More >