TY  - JOUR
AU  - Shahzadi, Iqra
AU  - Ahmed, Muhammad Waqar
PY  - 2025
DA  - 2025/06/21
TI  - Numerical Analysis of HBr-Cl2 Capacitive Coupled Plasma Using a Two-Dimensional Fluid Model
JO  - ICCK Journal of Applied Mathematics
T2  - ICCK Journal of Applied Mathematics
JF  - ICCK Journal of Applied Mathematics
VL  - 1
IS  - 1
SP  - 15
EP  - 24
DO  - 10.62762/JAM.2025.440251
UR  - https://www.icck.org/article/abs/JAM.2025.440251
KW  - two-dimensional fluid simulation
KW  - BrCl ion density
KW  - numerical analysis
AB  - This research focuses on the computational analysis and numerical investigation of BrCl ion density within an HBr-Cl_2 capacitively coupled plasma system. A two-dimensional fluid simulation model was developed to examine the influence of varying the HBr: Cl_2 gas ratio on BrCl ion formation. The simulation framework incorporates fundamental plasma fluid equations, including the continuity equation, momentum conservation equations, and energy conservation equations, along with appropriate boundary conditions. The investigation specifically explored gas composition variations ranging from 10% Cl_2 and 90% HBr to 90% Cl_2 and 10% HBr, incremented in 20% steps. The radio frequency (RF) driving frequency was fixed at 13.56 MHz throughout the simulations. Results revealed a positive correlation between the Cl_2 concentration and the BrCl ion density; higher Cl_2 content led to increased BrCl ion production. Notably, elevated BrCl ion densities were observed near the electrode edges and at the electrode center. The generated two-dimensional and three-dimensional simulation data offer foundational insights for practical industrial applications, particularly in advanced semiconductor etching and deposition technologies.
SN  - 3068-5656
PB  - Institute of Central Computation and Knowledge
LA  - English
ER  - 

@article{Shahzadi2025Numerical,
  author = {Iqra Shahzadi and Muhammad Waqar Ahmed},
  title = {Numerical Analysis of HBr-Cl2 Capacitive Coupled Plasma Using a Two-Dimensional Fluid Model},
  journal = {ICCK Journal of Applied Mathematics},
  year = {2025},
  volume = {1},
  number = {1},
  pages = {15-24},
  doi = {10.62762/JAM.2025.440251},
  url = {https://www.icck.org/article/abs/JAM.2025.440251},
  abstract = {This research focuses on the computational analysis and numerical investigation of BrCl ion density within an HBr-Cl\_2 capacitively coupled plasma system. A two-dimensional fluid simulation model was developed to examine the influence of varying the HBr: Cl\_2 gas ratio on BrCl ion formation. The simulation framework incorporates fundamental plasma fluid equations, including the continuity equation, momentum conservation equations, and energy conservation equations, along with appropriate boundary conditions. The investigation specifically explored gas composition variations ranging from 10\% Cl\_2 and 90\% HBr to 90\% Cl\_2 and 10\% HBr, incremented in 20\% steps. The radio frequency (RF) driving frequency was fixed at 13.56 MHz throughout the simulations. Results revealed a positive correlation between the Cl\_2 concentration and the BrCl ion density; higher Cl\_2 content led to increased BrCl ion production. Notably, elevated BrCl ion densities were observed near the electrode edges and at the electrode center. The generated two-dimensional and three-dimensional simulation data offer foundational insights for practical industrial applications, particularly in advanced semiconductor etching and deposition technologies.},
  keywords = {two-dimensional fluid simulation, BrCl ion density, numerical analysis},
  issn = {3068-5656},
  publisher = {Institute of Central Computation and Knowledge}
}